摘要
为了解决大口径光学元件在精磨阶段的检测问题,基于电磁场散射理论,分析了在红外干涉仪测量粗糙表面过程中,所产生干涉条纹的对比度与粗糙表面粗糙度之间的关系,并通过测量不同粗糙表面对这一结果进行了实验验证。利用红外干涉仪测量了280#精磨粗糙球面(Φ=1130mm,R=3600mm)的面形,讲述了测量大型粗糙球面时干涉仪的调整方法。从测量结果可以看出,此粗糙球面具有比较明显的球差,面形峰谷(PV)值为0.526λ(λ=10.6μm),均方根(RMS)值为0.117λ(λ=10.6μm)。
In order to measure optical components of large aperture in fine grinding process,the relationship of the contrast of interference fringes and the surface roughness was described by rigorous mathematical analysis based on the electromagnetic scattering theory.The mathematical derivation was verified with experimental data at different roughness.280# rough sphere with aperture Φ=1 130 mm,curvature radius R=3 600 mm,was measured by using the infrared interferometer.When a large aperture rough sphere was measured,the alignment method of infrared interferometer was introduced.The result shows that the rough sphere has obvious spherical aberration.The PV value of the rough sphere is 0.526λ（λ=10.6 μm）,and the RMS value is 0.117λ（λ=10.6 μm）.
出处
《应用光学》
CAS
CSCD
北大核心
2009年第6期969-973,共5页
Journal of Applied Optics
基金
南京天文与光学技术研究所横向课题<移相式红外干涉仪>
关键词
红外干涉仪
粗糙度
粗糙球面
infrared interferometer
roughness
rough sphere
