摘要
采用光纤探针的扫描近场光学显微镜 (SNOM)存在某些弱点 ,如探针特别脆 ,不易贴近样品表面扫描 ,探针的转输效率低等。近年来发展了将SFM /SNOM结合起来的扫描探测显微镜。利用微加工工艺技术 ,将小孔集成在悬臂探针中 ,使探针既能批量制备 ,又具有很好的重复性。探针悬臂在垂直于样品表面方向上的弹性常数较小 ,针尖不易损坏。在接触模式中利用这种SFM /SNOM组合探针可将样品的形貌像、摩擦力和光学透射像等信息同时记录下来。对于综合研究样品表面的介观性质十分有利。
In most cases a tapered optical fiber is used as near field probe that has disadvantages such as its fragile and lower lateral resolution due to the finite distance between tip and sample. Recently approaches for combined SFM/SNOM were developed. To improve the reproducibility of cantilever probes it is to introduce aperture probes that were microfabricated in a batch process. Due to the small spring constant of the cantilever in direction perpendicular to the sample surface tip damage is reduced. This allows utilizing combined SFM/SNOM probes in the contact mode where simultaneously the topography, the friction force and the optical transmission image of the sample are recorded.
出处
《光学技术》
CAS
CSCD
2000年第2期136-138,共3页
Optical Technique
基金
国家自然科学基金资助项目! (项目号 :698770 14 )
关键词
SNOM
SFM
显微镜
集成悬臂探针
scanning near field optical microscopy
scanning force microscopy
combined SNOM/SFM cantilever probe
micro fabrication
