摘要
研究了用迈克尔逊干涉条纹图像对比法测量微位移的实验.用He-Ne激光器、反射镜和分束镜组成干涉光路,一个反射镜固定在被测目标靶上,目标靶带动其中一个反射镜移动,使干涉光路发生变化,从而导致干涉条纹改变.利用线阵CCD采集干涉条纹图像并用对比法处理和计算,获得目标物的微位移.实验结果表明,用图像对比法处理干涉条纹,计算方法可行且准确率高,测量的精准度可以达到微米级.
The micro-displacement measurement experiment based on the comparison of Michelson interference fringe images is studied.The beam path of optical interference is composed with He-Ne laser,mirrors and beam splitter.The measured target is fixed with reflector.The target drives one of the mirrors that causing the change of interference optical path,thereby the interference fringes are led to change.The interference fringe images are collected by linear array CCD,which are analyzed and calculated by comparison method to achieving the micro displacement of target.Experiential results show that using image antitheses method to dispose interference fringes is feasible and has high accuracy of 1 micron level.
出处
《新乡学院学报》
2012年第1期30-32,共3页
Journal of Xinxiang University
基金
河南省科技攻关计划项目(112102310534)
河南科技大学青年基金项目(QN2010033)
河南科技大学大学生训练计划项目(SRTP 2011026)
关键词
微位移
激光干涉仪
线阵CCD
图像
micro displacement
laser interferometer
linear array CCD
images
