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PET表面镀SiO_x薄膜的研究进展及应用 被引量：1

Research Development and Applicationon of SiO_x Films on PET Substrate
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摘要 综述了采用磁控溅射技术和等离子体增强化学气相沉积技术制备SiOx/聚对苯二甲酸乙二醇酯(PET)薄膜的研究进展,探讨了SiOx/PET薄膜阻隔作用机理,此外还阐述了SiOx/PET薄膜的应用状况。 The research development of SiOx/polyethylene terephthalate（PET） film prepared by magnetron sputtering and plasma enhanced chemical vapor deposition technique are reviewed,the barrier mechanism of SiOx/PET film is discussed. In addition, the application status of SiOx/PET film is also elaborated.
作者 李春伟 曹奇 张义 张志力
机构地区 东北林业大学 陕西威能检验咨询有限公司
出处 《现代塑料加工应用》 CAS 北大核心 2012年第2期56-59,共4页 Modern Plastics Processing and Applications
基金 中央高校基本科研业务费专项资金(DL10BB11) 东北林业大学工程技术学院大学生创新性实验项目(CX_2011_18)
关键词 氧化硅 薄膜 聚对苯二甲酸乙二醇酯 磁控溅射 高阻隔 silicon oxide film polyethylene terephthalate magnetron sputtering high barrier
分类号 TQ320.67 [化学工程—合成树脂塑料工业]
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参考文献18

  • 1韩尔立,陈强,葛袁静,张广秋.SiOx包装阻隔薄膜的发展现状及其制备方法[J].包装工程,2005,26(6):76-78. 被引量：17
  • 2Satoru Iwamori,Yumi Gotoh,Krzysztof Moorthi. Silicon oxide gas barrier films deposited by reactive sputtering[J].Surface and Coatings Technology,2003.24-30. 被引量：1
  • 3Lin M C,Tseng C H,Chang L S. Characterization of the silicon oxide thin films deposited on polyethylenterephthalate substrates by radio frequency reactive magnetron sputtering[J].Thin Solid Films,2007.4596-4602. 被引量：1
  • 4Tomozeiu N,Rheiter H J H. Structure,composition,morphology and electrical properties of amorphous SiOx thin films[J].Thin Solid Films,2008.8205-8209. 被引量：1
  • 5陈强,孙运金,周美丽,韩而立,杨丽珍,张跃飞,李朝阳,许文才.等离子体技术制备氧化硅阻隔层薄膜的研究[J].包装工程,2008,29(10):8-11. 被引量：6
  • 6刘壮,林晶,孙智慧,高德.缠绕式射频磁控溅射聚酯(PET)表面沉积氧化硅(SiO_x)薄膜的研究[J].真空科学与技术学报,2009,29(S1):94-97. 被引量：5
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二级参考文献51

共引文献31

同被引文献15

  • 1Thakar Rucha, Dhawale Ajay. Potential Perspectives of Bio-Based Plastics for Food Packaging Appli- cations: A Review[J]. Popular Plastics & Packaging, 2014, 59(3): 27-31. 被引量：1
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  • 5Wei Chehung, Yen Juiying. Effect of Film Thickness and Interlayer on the Adhesion Strength of Diamond Like Carbon Films on Different Substrates[J]. Diamond and Related Materials, 2007, 16(4/5/6/7): 1325-1330. 被引量：1
  • 6Kim Young Gu, Junichi Tatami, Katsutoshi Komeya, et al. Effect of the Microstructure of Si3N" on the Adhesion Strength of TiN Film on Si3N4[J]. Thin Solid Films, 2006, 510(I/2): 222-228. 被引量：1
  • 7A1-Olayyan Y, Fuchs G E, Baney R, et al. The Effect of Zircaloy-4 Substrate Surface Condition on the Adhesion Strength and Corrosion of SiC Coatings[J]. Journal of Nuclear Materials, 2005, 346(2/3): 109-119. 被引量：1
  • 8Ding Zeliang, Wang Wentao, Sun Min, et al. Study on Interfacial Adhesion Strength of SiOz/PET Composite Packaging Film[J]. Advanced Materials Research, 2014(881/ 882/883) : 882-888. 被引量：1
  • 9Marius Jesdinszki, Carolin Struller, Norbert Rodler. Evaluation of Adhesion Strength Between Thin Aluminum Layer and Poly(Ethylene Terephthalate) Substrate by Peel Tests: A Practical Approach for the Packaging Industry[J]. Journal of Adhesion Science and Technology, 2012, 26: 20-21. 被引量：1
  • 10Lyphout Christophe, Nyl6n Per,(stergren Lars. Relationships Between Process Parameters, Microstructure, and Adhesion Strength of HVOF Sprayed IN718 Coatings [J]. Journal of Thermal Spray Technology, 2011, 20(1/2) : 76-82. 被引量：1

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现代塑料加工应用
2012年 第2期

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