摘要
本文介绍了稀有金属行业ITO靶材高温真空热压炉的设备组成、主要技术参数和结构特点,并指出了该设备在稀有金属行业ITO靶材制造行业推广应用的前景。
Describe the build-up, technical parameters and construction of the high temperature vacuum hot pressing furnace for ITO target in rare metal industry. The vacuum hot pressing furnace we developed would have a broad prosper in application.
出处
《真空》
CAS
2012年第2期36-39,共4页
Vacuum
关键词
ITO靶材
真空热压炉
热压烧结
ITO sputtering target
vacuum hot pressing furnace
hot pressing sintering
