摘要
本文对可溶盐基片方法制备薄膜TEM样品进行了改进。改进后不仅保持了原可溶盐基片法方便、高效和快捷的特点,还可以根据表征需要获得薄膜在不同生长阶段微结构的样品。
The soluble salt substrate method for thin film TEM sample preparation has been improved.The improved method not only retains the convenient and efficient features of the original method but additionally can provide sample microstructures in different growth stages according to characterization requirements.
出处
《电子显微学报》
CAS
CSCD
2012年第1期70-73,共4页
Journal of Chinese Electron Microscopy Society
基金
国家自然科学基金资助项目(No.51071104)
关键词
TEM
样品制备
薄膜
TEM
sample preparation
thin films
