摘要
基于微机电系统(Micro-electro-mechanical systems,MEMS)技术的微型超级电容器是一种以微纳米结构形式实现储能的微型能量存储器件,具有高比容量、高储能密度和高抗过载能力等特点,在MEMS微电源系统、引信系统以及物联网等技术领域具有广泛的应用前景。分析了超级电容器的基本原理和种类,系统综述了MEMS超级电容器的国内外研究现状,重点讨论了基于MEMS加工技术的超级电容器制造方法和优势,从材料、结构设计、加工工艺方面分析了MEMS超级电容器存在的技术瓶颈问题,并展望了其未来的发展趋势和应用需求。
Micro-supercapaeitor based on the micro-electron mechanical system （MEMS） technology is a kind of micro-energy storage device with micro/nanometer structures, which possesses the merits of high specific capacitance, high energy-storing density and high anti-overload ability. The application prospect of MEMS supereapacitor is extensive in the field of the micro-power system, MEMS fuze system and internet of things （IOT）. The supercapacitors＇ type and principle are generalized. The advancement and advantages of MEMS supercapacitors based on the MEMS technology are systematically summarized from abroad and home. The technical bottlenecks are analyzed from materials, structural design, processing technology, and the developing tendency is proposed for MEMS supercapacitors.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2012年第2期68-71,共4页
Electronic Components And Materials
基金
国家自然科学基金资助项目(No.51075374)
山西省高等学校优秀青年学术带头人支持计划资助
关键词
微机电系统
超级电容器
综述
微型能量存储
微纳器件
micro-electron mechanical system
supercapacitors
review
micro-energy storage
micro-nanometer devices
