摘要
采用紫外光助溶胶-凝胶法在玻璃基底上制备了掺铝氧化锌薄膜。研究了厚度对薄膜性质的影响,结果表明:所有薄膜均由具有c轴优先生长取向的六角纤锌矿结构的ZnO晶体构成,晶体的粒径随厚度的增加而先增大,达到最大值后,不再随厚度的增加而改变;薄膜的方阻随厚度的增加先减小,在达到最小值2.1×102Ω/□后,随厚度的增加又略有增大;而所有薄膜均是透明的,在可见光区的透光率>80%。
Transparent and conducting Al-doped ZnO thin films were prepared on glass substrates by the UV light-assisted sol-gel method. Effects of thickness on properties of the thin films were further studied. The results show that alt the films are constituted by hexagonal wurtzite crystals with the c-axis preferred orientation, and the crystal size firstly increases with the increase of film thickness, but when the crystal size amounts to the maximum, it will never change with the increase of film thickness; the sheet resistivity of films firstly decreases with the increase of film thickness, but when the sheet resistivity amounts to the minimum, 2.1×10^2Ω, it will increase gradually with the increase of film thickness; all the films are transparent, and transmittance of the film is over 80% within the visible wavelength region.
出处
《辽宁化工》
CAS
2011年第12期1226-1229,共4页
Liaoning Chemical Industry
基金
山西农业大学人才引进科研启动基金
项目编号:XB2010006
关键词
厚度
掺铝氧化锌
透明导电
薄膜
Thickness
Al-doped ZnO
Transparent and conducting
Thin film
