摘要
磁致伸缩效应可用作实现纳米级的微量进给。本文对所研制的磁致伸缩机构的性能进行了实验。此机构可在２．５μｍ范围内进行最小位移量为２ｎｍ，位置精度±２ｎｍ的微量位移。本文还介绍了利用磁致伸缩机构实现三向微量进给的微动工作台。
Abstract Magnetrostrictive effect can be used for microfeeding on nanometrescale.A mechnism based on the effect has been developed. The experimental results showthat it is capable of positioning to accuracies of ± 2nm by the minimum step length of 2nmover a 2.5μm range.A 3-direction moving stage is also presented.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1995年第S1期126-129,共4页
Chinese Journal of Scientific Instrument
