摘要
本文报道制备ＧａＡｓ透射式光阴极过程中窗玻璃与大面积ＧａＡｓ外延片热压粘结工艺的原理和过程，并重点分析抗反射膜的淀积、粘结温度控制和压力大小对粘结结果的影响。
In this paper we reported the process and principle of large-area GaAs epitaxial plate thermocompression bonded to K4 window-glass technology,and emphatically discussed the effects of the deposition of SiN film,the controlling of bonding temperature and the choice of pressure on bonding quality.
出处
《光子学报》
EI
CAS
CSCD
1996年第2期157-159,共3页
Acta Photonica Sinica
关键词
热压粘结
玻璃
GaAs外延片
Thermocompression bonding
Window-glass
GaAs epitaxial plate
