摘要
为了研究氮气压强对脉冲激光沉积(PLD)类金刚石(DLC)薄膜和红外光学特性的影响,在脉冲激光沉积类金刚石薄膜的实验过程中,把沉积腔抽真空到10-5Pa,再在沉积腔中分别充入10-3、10-2和10-1Pa的氮气来沉积类金刚石薄膜。用拉曼光谱仪和X射线光电子能谱仪(XPS)对类金刚石薄膜的微结构与组成进行检测分析;用原子力显微镜(AFM)对薄膜的表面形貌进行检测分析;用傅里叶变换红外光谱仪(FTIR)对类金刚石薄膜的红外光透射谱进行检测分析。实验结果表明,沉积腔中的氮气压强从10-3Pa增加到10-1Pa时,类金刚石薄膜中sp3键含量增加;C-O和C=O含量减少;石墨晶粒尺寸减小;薄膜表面粗糙度显著增大。与此同时,氮气压强增加还导致类金刚石薄膜对红外光的增透作用减弱、增透范围变窄。
How the nitrogen pressure in the chamber influences the diamond-like carbon （DLC） film deposited by pulsed laser deposition （PLD） and its infrared property are investigated. The DLC films are deposited on silicon substrates by pulsed laser when the nitrogen pressure in the chamber is 10^-3 , 10^- 2 and 10 ^-1 Pa respectively. The microstructure and composition of the DLC films are detected by the visible Raman spectroscopy and the X-ray photoelectron spectroscopy （XPS）. The topography of the DLC films is detected by the atomic force microscopy （AFM）. The infrared transmission spectra of the DLC film is detected by the Fourier transform infrared （FTIR） spectroscopy. The experimental results demonstrate when the nitrogen pressure is enhanced from 10 ^-3 Pa to 10^-1 Pa, the fraction of sp3 bonded carbon atoms should increase in the DLC films, the fraction of C-0 and C=O should decrease, the size of graphitic crystallites should decrease and the roughness of the DLC films should increase remarkably. At the same time, the infrared antireflection rate of the DLC films should decrease and the infrared antireflection range should become narrow when the nitrogen pressure is enhanced from 10 ^-3 Pa to 10^-1 Pa.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2011年第9期143-148,共6页
Chinese Journal of Lasers
基金
中国科学院"百人计划"资助课题
关键词
薄膜
类金刚石
脉冲激光沉积法
氮气压强
微结构
傅里叶变换红外光谱
thin films
diamond-like carbon
pulsed laser deposition
nitrogen pressure
microstructure
Fourier transform infrared spectra
