摘要
离子束混合制备表面合金相,是一种新的材料表面处理技术。本文用真空离子溅射技术在多晶Al表面沉积金属Mo膜形成Mo/Al复合层,用100keVA_r^+束轰击并经不同温度退火后,由x-ray衍射探测到在材料表面出现了Al_2(MoO_4)_3相,同时讨论了这一表面相的产生条件、成因及其随不同退火温度变化情况。
The method of producing surface alloy phases by ion beam mixing is a new technique used in the treatment of material surfaces. In this paper, a thin molybdenum film was de- posited on polycrystalline alluminium surface by using vacuum sputtering of ions. Having been bombarded with 100KeV Ar ions and anneated under different temperature, new surface alloy phases Al_2(MoO_4)_3 were detected by x-ray diffractometer. The forming conditions, reasons and the variance with the annealing temperature for the surface phases are also discussed.
出处
《西安石油学院学报》
1990年第3期79-83,共5页
Journal of Xi'an Petroleum Institute
关键词
离子束混合
IBM
表面合金相
ion beam mixing
Mo/Al bilayers
surface alloy phases
x-ray diffraction
diffusion
