摘要
研究了Ｍ２钢表面ＴｉＮ涂层的组织结构和性能。这种涂层是通过真空沉 积Ｔｉ原子和注入Ｎ离子交替进行的离子束混合技术实现的。每次沉积Ｔｉ原 子厚度１０００～４０００Ａ，注入Ｎ离子能量６０和９０ｋｅＶ，剂量２×１０１７～８×１０１７ Ｎ＋／ｃｍ２．分析讨论了改性层的相组成及其强化机制。结果表明，在适宜工艺 下，改性层具有高硬度、高耐磨性和优良的结合力。
Microstructures and properties of TiN coating on the surface of M2 steel have been studied. The coatings were prepared by ion beam mixing, i. e, the deposition of Ti atoms and the implan tation of nitrogen ions were carried out alternately on the M2 steel. The thickness of deposited Ti layers is 1 000- 4000 A in every step with the energy of 60keV and 90 keV respectively, the doses of 2× 1017-8X 1017N+/cm2. The phases and the strengthening mechanism of the modified layers have also bee discussed. The results show that high hardness, good wear resistance and excellent adhesion to substrate can be achieved under the proper conditions.
出处
《大连理工大学学报》
EI
CAS
CSCD
北大核心
1992年第3期279-285,共7页
Journal of Dalian University of Technology
关键词
离子束
工具钢
改性
显微结构
ion beams
deposition
tool steels
micostructure
properties
madification
