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基于p偏振光双面反射的薄膜传感器光学参数的优化 被引量:4

Optimization of Optical Parameters of the Film Sensor Based on p-Polarized Reflectance
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摘要 p 偏振光在镀膜平板玻璃上、下表面反射光强比γ的角度调制曲线的性状与膜层光学参数密切相关。分析了γ与膜层折射率、消光系数及膜厚的相对梯度随光学参数变化的关系, 为基于p 偏振光双面反射的薄膜传感器选择最佳参数提供了理论依据, 计算表明该类型传感器对膜层折射率的测量分辨率高达10- 7。对不同工艺条件下得到的溶胶-凝胶SnO2 膜进行光学参数测定及初步气敏实验, 结果表明p 偏振光双面反射可作为高灵敏度光化学传感器的检测方法。 The characteristic of the angular modulation curves of the reflectance ratio γ for p polarized beams from both sides of coated plane glass is closely related to the optical parameters of the films. The dependence of relative gradients of γ to the refractive index n, extinction coefficient k and thickness h of the films on the optical parameters are obtained theoretically, which provides theoretical basis for the optimization of parameters. By data simulation, the resolution of refractive index of film sensor based on the calculation is predicted to be less than 10 -7 . It has been measured that the optical parameters of sol gel SnO 2 films under different technological conditions and the sensitivity to the testing gas. The results indicate that the method of the p polarized reflectance can be widely used in high sensitivity optical chemical sensors.
出处 《光学学报》 EI CAS CSCD 北大核心 1999年第11期1556-1562,共7页 Acta Optica Sinica
关键词 p偏振光 反射比 光学参数 薄膜传感器 p-polarized light, reflectance ratio, optical parameter, sol-gel, film sensor.
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  • 1梁培辉,光学学报,1985年,5卷,1期,55页 被引量:1
  • 2唐晋发,应用薄膜光学,1984年,73页 被引量:1
  • 3黄占杰,玻璃表面物理化学(译),1986年 被引量:1

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同被引文献16

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