期刊文献+

透射光谱法测试薄膜的光学参数 被引量:3

Determination of the optical constants of thin films from transmittance spectrum
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摘要 推导了使用透射光谱极值法来确定薄膜光学参数的理论公式,并对溶胶—凝胶法制作的掺不同浓度二氧化锡的二氧化硅薄膜的折射率和厚度进行了计算。由于透射光谱法来确定薄膜的光学参数时需要其有一定的厚度来形成干涉峰,而用溶胶凝胶浸渍法单次提拉的薄膜厚度太薄,因此用多次提拉的方法来增加厚度。最后借助于柯西色散公式,在其它波段对折射率进行了拟合。结果表明,薄膜的折射率随着二氧化锡含量的增加而增加,相同提拉次数的薄膜厚度也基本相同。 Formulas of parameters of optical films theoretically with extreme value point are derived. The refractive index and the thickness of Sol-gel produced stannum dioxide doped in different concentration silicon dioxide films are calculated. Enough thickness is a necessity to form the interference peak in transmission spectrum method, however, Sol-gel produced films are relatively too thin, and thus multi-pulling method is used to increase the thickness. The refractive indexes on other wavelengths are fit with Cauchy formula finally. The results show that the refractive index of films increases with the raising of concentration of stannum dioxide, and with the same times of pulling, the thickness of the films keeps constant.
出处 《光学仪器》 2009年第2期89-93,共5页 Optical Instruments
基金 上海理工大学学生创新基金资助项目
关键词 透射光谱 薄膜 光学参数 折射率 transmission spectrum thin films optical parameters refractive index
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