摘要
在相移测量剖面术(PMP)中, 提出了一种基于快速傅里叶变换的相移校正算法, 利用最初多采的一幅条纹图的信息和傅里叶变换调制度模板, 快速地计算出当前的相移值。采用该算法, 能实时准确地控制投影光栅的移动, 大大提高了测量系统的精度和自动化程度, 具有极大的实用价值。
In phase measuring profilometry (PMP), a new simultaneous calibration algorithm of phase shifting based on fast Fourier transform (FFT) is presented. The current phase shifting is calculated with the help of the information of a additional fringe pattern and a FFT modulation mask. With this algorithm, the moving of the project grating can be controlled accurately and simultaneously, the accuracy and the automation of the measuring system are improved greatly.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1999年第10期1390-1395,共6页
Acta Optica Sinica
基金
国家自然科学基金
关键词
相移测量剖面术
快速傅里叶变换
相移校正
phase measuring profilometry, fast Fourier transform, phase shifting calibrate, modulation mask.