摘要
本文采用磁控溅射方法,通过金属钼靶材在Ar+O2气氛中反应溅射制备了氧化钼薄膜。在制备样品过程中改变反应气氛O2的流量,保持其它参数不变,得到不同的氧化钼薄膜。采用X射线衍射(XRD)和扫描电子显微镜(SEM)方法对MoO3薄膜样品结构进行表征。XRD测试结果表明MoO3薄膜样品均为非晶结构。MoO3薄膜样品的光学性能和电致变色性能采用分光光度计进行测试研究。研究结果表明,当反应气氛O2/Ar流量比例为1:5时,所制备的样品具有较高的可见光透射率,可见光平均透射率为90%,并且电致变色性能较好,调色范围达到了66.94%。
Different MoO3 thin films were prepared by dc reactive magnetron sputtering with Mo target in the Ar＋O2 mixed atmosphere via changing the O2 flowrate.Structure of the MoO3 film samples were characterized by XRD and SEM.The XRD pattern indicated that all the samples are amorphous.Optical and electrochromic properties of the samples were tested by spectrophotometer.The results showed that when the O2/Ar flow ratio is 1：5,the MoO3 film has better optical and electrochromic properties.The average transmittance of the films in the visible range is about 90%,and the modulating range of color is up to 66.94 %.
出处
《真空》
CAS
北大核心
2011年第3期58-61,共4页
Vacuum
基金
河南省重点科技攻关计划(No.102102210184)
河南省教育厅自然科学研究项目(No.2010B140008)
河南师范大学引进博士科研启动基金项目(No.525402)
关键词
MoO3薄膜
磁控溅射
氧流量
光学性能
电致变色性能
MoO3 thin film
magnetron sputtering
oxygen flowrate
optical property
electrochromic property
