6Stewart R. MEMS low cost inertial grade accelerometers and gyros using a common, bulk micromachining process. Proceedings of the AIAA Conference on Guidance. Navigation and Control, 1999-08 : 736-742. 被引量：1
7Wisniowski H. Analog devices introduees world' s first integrated gyroscope. 2002-10-01 http:// www. analog, com/ technology/ meres/gyroscopes. 被引量：1
8Xue Songjiang, Seeger J I, Kraft M, etal. A monolithic surface micromachined Z-axis gyroscope with digital output. VLSI Circuits, Digest of Technical Papers 2000 Symposium on, 2000(6) :16-19. 被引量：1
9Matthews A, Paterson R, Goldman A, Abbink H, Stewart R. A new paradigm in guidance, navigation, and control systems based on bulk micromachined inertial sensors. Proceedings of the AIAA Conference on Guidance, Navigation and Control, 2000-08 : 1-12. 被引量：1
