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微装配技术的进展和发展趋势 被引量:4

Progress and Development Trend in Microassembly Technology
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摘要 随着微机电系统的快速发展 ,对微装配技术的需求日益迫切。本文详细地综述了近年来微装配技术发展的几个主要方面 ,包括 :微装配机理 ,视觉伺服微装配的结构 ,微夹持器等等。 Microassembly technology is increasingly required with the rapid development of microele- tromechanical system (MEMS) . In this paper,some main issues involved in microassembly are surveyed in- cluding the mechanics of micromanipulation,visual servoing frameworks for microassembly,design of micro- endeffectors and so on. In the end of this paper,also some issues aboutfuture focus in our pointare presented.
出处 《仪器仪表学报》 EI CAS CSCD 北大核心 2001年第z2期325-326,共2页 Chinese Journal of Scientific Instrument
基金 21 1工程资助项目 (2 1 0 2 0 0 2 0 0 1 )
关键词 微装配 机器人 视觉伺服 Microassembly Robotics Visual servoing
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  • 1[1]J.T.Feddema and R. W.Simon. CAD-Driven Microassembly and Visual Servoing. Proc. 1998 IEEE Inter. Conf. On Robot. and Autom., Leuveu, Belgium, 1998, 1212~1219. 被引量:1
  • 2[2]F. Arai and T. Fukuda. Adhesion-type Micro Endeffector for Micromanipulation. IEEE Int. Conf. On Robotics and Automation, Albuquerque, New Mexico, April, 1997. 被引量:1
  • 3[3]B. J. Nelson, Y. Zhou, and B. Vikramaditya Sensor-Based Microassembly of Hybrid MEMS Devices. IEEE Control Systems, 1998, 18(6):35~45. 被引量:1
  • 4[4]E.Shimada, J. A. Yhompson, J. Yan, R. Wood and R. S. Fearing. Prototyping Millirobots Dextrous Microassembly and Folding. Proc. ASME/IMECE/DSCD, Nov. 5-10, 2000, Orlando, Florida. 被引量:1
  • 5[5]M.C.Carrozza, P. Dario, A. Menciassi, A. Fenu. Manipulating Biological and Mechanical Micro-Obiects Using LIGA-Microfabricated End-Effectors Proc.1998 IEEE Inter. Conf. On Robot. and Autom., Leuveu, Belgium, 1998, 1811~1816. 被引量:1

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