摘要
本文研究多点法机床主轴回转运动准确度测量系统中的关键技术。以8阶Butterworth滤波器MAX291为核心改进了电容测微仪系统的动态测量电路,改进后的电容测微仪在±10μm的量程内,非线性误差最大不超过0.8%,重复性准确度优于0.15%,测量准确度优于0.1μm,频响范围达4.2kHz。研究了电容测微仪动态灵敏度及线形度的测试与标定方法。
Thekeytechniquesforamulti\|pointmeasuringsystem for the error motions of a lathe spindle are studied in thispaper.Theimprovedcapacitancemicrometerwith high accuracy and frequency response has been developed,which dynamic measuring circuit adopts an 8\|order Butterworth filter as the key device.The frequency response range of the improved capacitance micrometer is up to 4.2kHz,the maximal relative non repeatability and the non linearerrorsarelessthan0.15% and 0.8% respectively,and the measurement accuracy is better than 0.1μm within ±10μm.The test and calibration methods of the dynamic characteristics of the capacitance micrometer are proposed.A practical measuring system of multi\|channel simultaneous data sampling has been developed.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1999年第5期526-528,540,共4页
Chinese Journal of Scientific Instrument
基金
高等学校博士学科点专项科研基金
关键词
动态测量
准确度
机床
主轴
多点法
Dynamic measurement\ Capacitance micrometer\ Frequency response\ Accuracy\ Calibration
