摘要
为了满足微米量级氧化铟锡线路检测的需求,提出了一种高分辨率的用于检测氧化铟锡线路缺陷的检测系统,其检测精度可达2μm。采用高分辨率线阵CCD相机以及中长焦镜头以获得较高的图像放大率与图像精度;通过分离相机与镜头及镜头倒置以获得较大的动态范围和较好的调制转换函数优化值;采用直线电机提高系统的运动精度与稳定度;同时采用大理石底座以减小周围环境的振动等对系统精度的影响。通过具体分析系统精度与速度要求,再考虑现场环境,对不同结构系统的优劣势进行了研究与论证。结果表明,该系统具有精度高、稳定性高、操作灵活等显著特点。
A defect detection system for lines on indium tin oxide glass was designed and the detection precision reached 2μm. Firstly, higher image magnification and image accuracy were obtained by using a high resolution linear CCD camera and the telephoto lenses; secondly, larger dynamic range was realized through the separation of camera and lens and a suitable modulation transfer function value was achieved through ceiling mounting the lens; the system precision and system stability were improved with a linear motor. At the same time, marble base was used to reduce the influence of surrounding vibration on the accuracy of the system. Finally, the advantages and disadvantages of system with different structure were concretely analyzed. Experiments show that the system has high precision, high stability, flexible operation, and other notable features.
出处
《激光技术》
CAS
CSCD
北大核心
2013年第1期24-27,共4页
Laser Technology
关键词
测量与计量
成像系统
高分辨率
光学检测
线扫描系统
measurment and metrology
imaging system
high resolution
optical inspection
line scan system
