摘要
采用准分子激光扫描消融法淀积YB32C23O7-δ高温超导薄膜，利用常规光刻工艺制备线列高温超导薄膜器件，采用离子束刻蚀制备与高温超导薄膜器件匹配的熔凝石英微透镜阵列，测试了微透镜／高温超导薄膜器件所构成的混合结构在1～5μm红外波段的几项重要的光响应特性．
The YBa2Cu3O7-δ high Tc superconducting thin film were deposited by excimer laser scanning ablation, the superconducting thin film detectors were patterned by photolithography method, the single plate cylinder microlens arrays were fabricated by Ar ion beam etching, the hybrid IR detecting device was prepared by using the special glue to couple the micro-optical device and the superconducting thin film IR device, and the optical response characteristics of the device fabricated in the region of 1～5 μm IR optical spectrum was investigated.
出处
《量子电子学报》
CAS
CSCD
1999年第5期452-459,共8页
Chinese Journal of Quantum Electronics
关键词
石英柱微透镜
红外探测器
高温超导薄膜
fused quartz cylinder microlens
high Tc superconducting thin film detector
infrared detecting
