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基于莫尔信号的超精密复合定位研究

Research on Compound Ultra-Precision Alignment Based on Moiré Signals
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摘要 应用光学理论研究了透射式激光莫尔信号的位移特性,建立了衍射莫尔信号强度与对应位移的数学模型,并通过计算机仿真对莫尔信号的位移特性进行了研究.在此基础上设计了一套基于激光莫尔信号的超精密定位系统,系统取透射的零次莫尔信号为控制信号,由微机控制实现高精度位置检测及精密自动定位.针对精密定位高精度与大行程之间的矛盾,提出了一种利用一对细光栅实现复合定位的解决方法,通过粗定位和精定位相结合的两段式复合定位,可保证在较大的信号捕捉范围内,实现高速高精度定位.由于系统仅使用一对光栅,结构简单、可靠性高.实验结果表明,基于一对衍射细光栅的复合式精密定位可在±500μm信号捕捉范围获得±10nm的定位精度,对精密加工工程领域具有重要的实用价值. The correlation between displacement of double diffracting gratings and the intensity of Moire signal is studied using optics theory; A mathematical model of precise displacement detection based on the Moire signal is established. The characteristics of laser Moire signals are studied by numerical simulation of Moire signals. The research results are applied to develop ultra-precision positioning stage. The stage can achieve precise position measurement and automatic precision alignment by the 0-th order Moire signal. In view of the contradiction between high accuracy and long work range of alignment, a novel compound alignment method is developed and reported, in which the coarse and fine alignment are completed only using one pair of narrow pitch grating. By using the two-step alignment, the high alignment accuracy and quick alignment speed are obtained in the wide positioning range. The positioning system is simple in structure by using only one pair of narrow pitch gratings. The experimental result shows the compound alignment can perform positioning accuracy of ± 10nm in ± 500μm positioning range. The approaches are of high value for accelerating the advancement of precision machining technology.
出处 《南京师范大学学报(工程技术版)》 CAS 2011年第1期33-38,共6页 Journal of Nanjing Normal University(Engineering and Technology Edition)
基金 国家863计划项目(2005AA303610) 江苏省自然科学基金项目(BK2009406)
关键词 衍射光栅 莫尔信号 纳米定位 复合控制 diffracting gratings, moire signals, nanometer alignment, compound control
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