摘要
超精密金刚石砂轮磨削是大口径先进光学元件微纳加工的主要技术,是实现确定性批量加工的重要保证.以实现高精度、高效率、高自动化程度加工为目的,阐述了大口径光学元件微纳加工与检测的加工技术系统,详细分析高精度加工设备及工艺控制、大尺寸检测、加工环境监控、快速抛光、表面织构化等研究应用情况.
Ultra precision grinding with diamond wheel is widely used for manufacture of large scale optical lens,especially for batch processing,as the key technology of micro/nano machining and measuring.This paper presents the technical system of micro/nano machining and measuring for large-scale optical manufacture,and introduces the studies of the research team in Xiamen University in the field of advanced optical machining,precision machine tool,micro/nano measuring,fast controllable polishing,machining environment monitoring,and textured surface fabricating.
出处
《厦门大学学报（自然科学版）》
CAS
CSCD
北大核心
2011年第2期286-292,共7页
Journal of Xiamen University：Natural Science
基金
国家高技术研究发展计划(863)重点项目(2008AA042501)
国家自然科学基金项目(51075343,50905150)
福建省科技重大专项(2006HZ0002-4)
福建省自然科学基金资助项目(2010J05122)
关键词
微纳米加工
检测
超精密加工装备
快速抛光
加工监控
表面织构化
micro/nano machining
measuring
ultra-precision machine tool
fast polishing
machining monitoring
textured surface fabricating
