摘要
利用半导体晶体吸收光的波长随温度变化的特性,设计了基于波长调制的新型半导体光纤温度传感系统。使用半导体GaAs材料作为敏感元件,采用了新型反射式结构的传感探头,具有体积小、电绝缘性好和响应快等特点。采用基于CCD衍射解调技术对传感器的反射信号波长进行解调,克服了光强调制解调易受光源抖动和光路扰动影响的缺点,缩短了系统响应时间,扩大了测温范围,提高了系统的测量精度和稳定性。实验分析了不同温度下半导体吸收后的反射光谱,并验证了半导体传感特性。实验结果表明,该系统在0~235℃测温范围内的精度为±0.5℃,分辨率为0.1℃,响应时间小于6 s,长时间稳定性实验的温度最大波动范围为±0.3℃。
A novel fiber-optic temperature sensing system is developed based on wavelength modulation,which utilizes the temperature dependence of the band edge absorption of infrared light in GaAs semiconductor.A semiconductor GaAs chip was used as sensitive component and a new reflective sensing probe was used in this system.The advantages of the probe are small size,perfect insulation and quick response.In addition,the diffraction technique based on CCD was used to demodulate reflected signal of the sensor,and it can eliminate the influence of intensity fluctuation of the light source and the disturbances of optical path.The response time is greatly reduced,the temperature measurement range is expanded and the accuracy and stability are improved.Reflectance spectra at different temperatures verified the sensing characteristics of GaAs semiconductor in further.The experimental results indicate that the system has the accuracy of ±0.5 ℃,resolution of 0.1 ℃ and response time of less than 6 s with the range of 0-235 ℃.The result of long time stability monitoring also shows that the maximum temperature fluctuation is±0.3 ℃.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2011年第3期347-351,共5页
Journal of Optoelectronics·Laser
基金
山东省中青年博士基金资助项目(31400004020921)
关键词
半导体
波长调制
衍射解调
光纤温度传感器
反射式
光谱分析
semiconductor
wavelength modulation
diffraction demodulation
fiber-optic temperature sensor
reflecting
spectral analysis
