摘要
作为稀土氧化物的一种,氧化铒具有优良的光学和电学性能,具有广阔的技术应用前景。本文综述了Er2O3薄膜的各种应用,描述了Er2O3薄膜的各种制备方法及研究现状,并对各种制备方法的优缺点进行了评述,最后对Er2O3薄膜的应用和制备方法作了总结。
As one of the rare-earth oxides,erbium oxide has excellent optical and electrical properties,for which it has extensive technological application potentials.The application of erbium oxide films was overviewed here.We also represented different kinds of preparation methods for erbium oxide thin films.And the advantages and disadvantages of each type of preparation technology were evaluated.Finally,the application and the preparation technology were summarized.
出处
《金属功能材料》
CAS
2011年第1期76-80,共5页
Metallic Functional Materials
关键词
氧化铒
薄膜
应用
制备方法
研究进展
erbium oxide
thin films
application
preparation technology
researching development
