摘要
通过Nd：YAG激光器四倍频266nm偏振脉冲激光的扫描曝光，在聚酰亚胺表面制得了大面积的精度为0.2μm的周期性纳米线条。实验结果表明：随着激光能量密度的增加，纳米线条的深度增加；线条的周期性和入射光的角度符合关系式；周期性纳米线条的方向始终平行于偏振激光束的偏振平面方向；在20°入射角、40mW激光功率时能得到较理想的线条高宽比。
A 200nm space-and-width linear periodic siructures in a large area have been produed on polyimide films using a polarized beam of Nd:YAG 4th harmonic laser irradiation.The linear direction is parallel to the polarization diredion. The periodidty of lines depends mostly on the laser wavelength and the angle of incidence , it can be indicated with while the depth of lines depends moshy on fluenas of light. With the increasing of the fluenas, the depth of the lines increases. The best periodic lines could be obtained in the condition of wavelength of 266nm, angle of inddence 0f 20' and fluenas of 30mJ/cm^2. LIPS was formed by repeated heating and cooling the polymer surface following the intensity distribution caused by interference of refled surface electromagnetic wave and incoming polarized laser beam. Consequently, after certain amount of continuous pulse, periodic ripple structures were formed and then the incident waves were waveguided by the corrugated structures initially formed to deveop line structures . We also found that a few photo -oxidation reactions took place on film surface during the proass of formation of LIPS which may have some influences on the formation of LIPS. 5
