摘要
移相干涉技术是高精度面形检测的主要手段之一,但当图像中含有大噪声和大块无效区域时,解包却是一个难题。将噪声点分为残差点和不连续点,对残差点采用三点邻域的组合对其进行判定,对不连续点在解包前后进行两次标记,并在解包后利用邻域有效点的均值来复原噪声点,从而改进和完善了种子点解包算法。仿真结果表明,改进后的算法有较强的噪声抑制能力,有效解决了在大噪声、大块无效区域情况下图像的相位解包问题,且解包出来的图像中不再含有大的噪声,可用均值滤波进行平滑处理。
The phase shifting interference technology is one of the principal methods of high accuracy surface profile measurement. The phase unwrapping is a challenging problem when the pattern contains high level noises and bulk invalid regions. We improve seed-unwrapping algorithm through identifying the residues with combination of their three neighborhoods, marking discontinuities before unwrapping and after unwrapping, and recovering the residues and discontinuities with average value of their neighborhoods after unwrapping. The simulation indicates that it is robust for unwrapping of patterns with high noises and bulk invalid regions, and there are no high noisy points in the images unwrapped by the improved algorithm, and the unwrapped images can be well smoothed by average value filter.
出处
《激光与光电子学进展》
CSCD
北大核心
2011年第1期67-72,共6页
Laser & Optoelectronics Progress
关键词
光学检测
相位解包
移相干涉
噪声处理
残差点
optical measurement
phase unwrapping
phase-shifting interferometry
noise processing
residues
