摘要
设计了自制真空变温薄膜电阻测试仪器,可以实现粗真空条件下,从室温到300℃的四探针法薄膜电阻测试.该仪器适用于开展薄膜物性与电阻和温度相关的实验,例如,金属与半导体薄膜的温度-电阻特性实验,二氧化钒薄膜热滞效应实验等.
New self-made instrument for measuring thin film resistance using four-probe method with varying temperature（from room temperature to 300 ℃） under rough vacuum was introduced.It was suitable for the development of physics experiments on properties related to the temperature-dependent resistance,for example,the resistance v.s.temperature characteristic of metal and semiconductor thin film and thermal-lag effect of vanadium dioxide thin film,and so on.
出处
《物理实验》
北大核心
2011年第1期28-30,33,共4页
Physics Experimentation
关键词
真空
变温
薄膜电阻
vacuum
varying temperature
thin film resistance
