摘要
提出了一种新型光纤氢气传感器的制作方法。将光纤的包层侧边部分抛磨成"D"形状,用磁控溅射法在表面镀上钯(Pd)和Pd/WO3氢气敏感薄膜,制作出了倏逝场型光纤氢气传感器。实验结果表明,镀有Pd/WO3复合膜的传感器具有较好的线性关系和可重复性,单模光纤比多模光纤稳定性好。
A novel fiber-optic hydrogen gas sensor is proposed.The side of fiber cladding is polished to "D" shape,Pd and Pd/WO3 hydrogen-sensitive films are coated on the polished surface by magnetron sputtering,then an evanescent field fiber-optic hydrogen sensor is fabricated.The results show that a sensor which has composite Pd/WO3 thin film has good linerarity and repeatability.Meanwhile,compared with multi-mode fiber,single-mode fiber is more reliable.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2010年第12期3398-3402,共5页
Acta Optica Sinica
基金
国家自然科学基金(60908020)
武汉理工大学自主创新研究基金(2010-2Y-LX-019)资助课题
关键词
光纤光学
光纤氢气传感器
倏逝场
抛磨
磁控溅射
fiber optics
fiber optic hydrogen sensor
evanescent field
polish
magnetron sputtering