摘要
本文介绍了一种用于近场扫描光学显微镜（ＮＳＯＭ）中的高透过率光纤探针的制作方法．采用缓冲氢氟酸腐蚀低掺杂的普通单模石英光纤，选取适当比例的腐蚀液，可以得到直径、圆锥角均十分理想的针尖．这种方法不需要高掺杂的特殊光纤或是采用先熔拉后腐蚀的复合工艺．针尖经过镀膜后经测量为针尖直径１００ｎｍ、透过率５．５×１０－４．
It is
presented a one step technique of fabricating a high transmission fiber probe for near field
scanning optical microscope (NSOM).A commercial single mode silica fiber with a low GeO 2
doped core is etched in buffered hydrofluoric acid (HF).At a proper ratio of the etching
solution,the tradeoff between tip cone angle and diameter is satisfied very well.Therefore,a
selective chemical etching for special high doped fiber or a hybrid pull etch process is not
necessary.After coating tip with aluminum,we obtained fiber probes with typical parameters as
follows:tip diameter of 100nm and transmission efficiency of 5.5×10 -4
出处
《光子学报》
EI
CAS
CSCD
1999年第5期436-439,共4页
Acta Photonica Sinica
基金
"九.五"攀登计划预选项目
关键词
近场
扫描光学显微术
光纤探针
化学腐蚀
制作
Near
field scanning optical microscopy
Fiber probe
Chemical etching
Aluminum evaporation
