摘要
利用电弧离子镀技术在钛合金表面制备CrNx薄膜,分析讨论氮气分压对薄膜表面形貌、相组成和微观结构的影响。结果表明,随着氮气分压的升高,CrNx薄膜表面熔滴的数量及尺寸减少,表面平整度得到明显改善;薄膜的物相组成在氮气分压为1.0 Pa时由Cr2N相变为CrN相;同时因氮气分压改变粒子、离子的轰击作用,影响薄膜表面的能量状态,CrNx薄膜晶体的择优生长由(200),(220)变为(111)。在氮气分压为1.5 Pa时可获得高沉积效率、高致密度、高硬度,并具有纳米晶体结构的单相CrN薄膜。
The CrNx coatings were deposited by arc ion plating on Ti-6Al-4V substrates.The impacts of the coating conditions,including the nitrogen partial pressure,deposition rate,duty cycle of the voltage pulse,on mechanical properties of the coating were evaluated.The microstructures of the coating were characterized with scanning electron microscopy,X-ray diffraction,and transmission electron microscopy.The results show that the nitrogen partial pressure significantly affects the surface morphologies,microstructures and mechanical properties of the CrNx coatings.For example,as the partial pressure rises up,the coating becomes increasingly smooth with decreased number and sizes of Cr droplets.At a 1.0 Pa of nitrogen,the Cr2N phase transited into CrN.Moreover,the partial pressure influenced the bombardment of charged particles and the electronic properties of the surface.At 1.5 Pa,CrN and a high deposition rate,highly compact,nanocrystal CrN films with high surface hardness can be grown.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2010年第6期662-666,共5页
Chinese Journal of Vacuum Science and Technology
基金
江苏大学高级人才基金(No.07JDG032)
江苏大学科技创新团队资助课题
