摘要
利用DMD空间光调制器与计算机的良好接口和控制系统的可编程性,将其作为二维图像发生器介入激光直写系统;采用高质量相机镜头,设计了基于DMD数字微镜的激光面阵干涉成像系统和相关的光刻软件,并进行了实验,制作了缩微图像、数字掩模灰度图像和激光数码全息图像等。
DMD space light modulator, with good computer connection and good of programmability of it＇s control system, has been used as two-dimensional image generator involving in direct laser writing systems. Uses the high-quality camera lenses, designed laser surface interference lithography imaging systems based on DMD digital micromirror and related software, we has performed the experiments, produced the microimage, digital mask grayscale figures and laser digital holographic images.
出处
《应用激光》
CSCD
北大核心
2010年第5期410-413,共4页
Applied Laser
基金
上海市科学技术委员会应用技术开发专项资金项目(项目编号:08-205)
