摘要
数字掩模技术是一种很有发展前途的衍射微光学元件制作技术。实际制作时,由于感光材料具有感光非线性,实际可利用的灰度数目将小于256。即使256级灰度全部可用,也无法实现曝光量的精细控制以达到一般的加工要求。文中提出了2种灰度细分的方法,即多SLM组合调制和彩色等效灰度技术。从理论上分析了2种方法均能实现灰度的细分,从而达到曝光量的精细控制。
Digital mask technology is a method with good prospect that manufacture diffractive optical element.While diffractive optical element is made,the number of gray level that can be used will be less than 256 due to sensitive nonlinearity of photosensitive material.Even if 256 gray grades can be used entirely,fine control that obtains general processing demand will not be realized.In the paper,two methods of gray subdivision and expansion are put forward.They are assembled modulation by many SLMs and color-equivalent-gray technology.It is analyzed theoretically that two methods both can realize gray subdivision,which can result in elaborate control of light exposure.
出处
《激光与红外》
CAS
CSCD
北大核心
2011年第5期569-572,共4页
Laser & Infrared
关键词
数字掩模
空间光调制器
灰度细分
digital mask
spatial light modulator
gray subdivision
