摘要
】利用ＡＴ切型的厚度剪切石英晶体谐振器沿不同方向施加外力时，将会获得不同的灵敏度这一特点，本文研究了一种新型的差动石英谐振式力敏传感器。将两个同频率的敏感石英谐振器以对称简支方式固定在传感器内，使外力分别沿两个敏感谐振器的ｘ轴和ｚ′轴作用，产生两个方向相反的频率变化，通过电路混频，形成差动输出。分析结果表明，采用这种差动方式将使传感器性能得到明显提高。
A novel differential quartz resonant force sensor was studied in this paper based upon the unique feature of AT-cut quartz resonator that will have different force sensitivities when acted with a pair of diametrical forces in different azimuth angles. The new sensor was designed with two sensing resonators supported in parallel in the shell to share the applied force, one with the force applied in the crystallographic X-direction and the other with the force applied in the crystallographic Z'-direction of AT-cut plate. When force is applied, it is divided into two components acting on the two sensing resonator and causes two frequency shifts in contrary directions. The sensor give a differential frequency output by mixing the two frequencies. The analysis proved that the differential sensor will have a much better performance than the sensor with only one sensing resonator.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第5期7-9,共3页
Instrument Technique and Sensor
