摘要
本文所述的超光滑表面无损检测轮廓仪，无需标准参考面；利用双焦干涉作非接触无损检测；利用干涉及电子共模抑制技术可有效地抑制各类噪音；计算机控制测量，即时给出表面粗糙度参数，与ＷＹＫＯ比对，结果吻合．仪器特别适合于均方根值Ｒｑ为纳米及亚纳米量级的软质金属材料及膜层表面测试．其横向分辨率为１μｍ，纵向分辨率为０．１ｎｍ．
The paper described a double focus interference profiler,its
characterizations as below:there isn′t standard reference mirror in the instrument Non
destructive testing is operated for surface It will be valid for rejecting various noise using
interference and electronic common mode processing system.All measurements are carried
out by computer then surface roughness parameters are displayed The results are compared
with commercial WYKO and identity is very well The instrument is suitable for testing
nanometer and subnanometer surface,especially soft materials and films.The instrument has a
sensitivity to height of 0.1nm and the lateral sensitivity 1μm
出处
《光子学报》
EI
CAS
CSCD
1999年第4期371-374,共4页
Acta Photonica Sinica
基金
863计划资助
关键词
轮廓仪
表面轮廓
纳米测试
超光滑表面
Interferometry
Optical
profiler
Surface roughness
Ultra smooth surface
