摘要
用Raman散射研究了对向靶反应溅射法制备的CN薄膜的键结构研究表明，在C膜中掺杂N可以抑制CN膜中sp3键的形成，提高sp2键的相对含量。
The thermal stability of CN films prepared by dual-facing-target sputtering was investigated by using Raman scattering. The results indicate that the formation of sp3 bonding can be suppressed by doping N atoms, and therefore the fraction of sp2 bonding is increased. It was also found that nitrogen incorporating is an effective method to improve the thermal stability of C films.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第7期762-766,共5页
Acta Metallurgica Sinica
基金
国家自然科学基金!59801006
国家教委博士点基金!D096006
天津市21世纪-青年科学基金!9837001111
天津大学理科青年基金
