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The mathematical model and simulation of the electrostatic suspension system in the vertical direction

The mathematical model and simulation of the electrostatic suspension system in the vertical direction
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摘要 In order to research the vibration law of electrostatic suspension systems in the vertical direction, the mathematical model as a nonlinear differential equation is established. A series of simulation is carried out. The results show that the solution of the differential equation is a periodic function. The amplitude becomes bigger with the original velocity increased. The period becomes smaller with the original velocity increasing. The numerical methods are presented to derive the amplitude and the frequency, and the results coincide with that of the simulation. The condition during which the simple harmonic vibration arises is pointed out. The expressions for the amplitude and the period of simple harmonic vibration are derived respectively, and the results are the same with that of the simulation. This study is helpful for researching the vibration characteristics of the electrostatic suspension system. The external disturb should be controlled to lower the amplitude and the frequency of the vibration.
出处 《Engineering Sciences》 EI 2008年第2期46-49,共4页 中国工程科学(英文版)
基金 This study is supported by the National Natural Science Foundation (No.50375113).
关键词 electrostatic suspension mathematical model SIMULATION 悬浮系统 垂直方向 数学模型 静电 非线性微分方程 仿真 振动规律 简谐振动
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  • 1崔峰,陈文元,苏宇锋,吴校生.悬浮转子式微机械陀螺仪的研究进展[J].压电与声光,2005,27(3):243-246. 被引量:10
  • 2何国鸿,博士学位论文,1994年 被引量:1
  • 3Kraft M.Micromachined inertial sensors:The state of the art and a look into the future[J].IMC Measurement and Control,2000,33 (6):164-168. 被引量:1
  • 4Kraft M,Farooqui M M,et al.Modelling and design of an electrostatically levitated disk for inertial sensing applications[J].Journal of Micromech Microeng,2001,11(4):423-427. 被引量:1
  • 5Shearwood C,Ho K Y,Williams C B,et al.Development of a levitated micromotor for application as a gyroscope[J].Sensors and Actuators A,2000,83:85-92. 被引量:1
  • 6Hawkey T,Torti R,Johnson B.Electrostatically controlled micromechanical gyroscope[P].US Patent,G01C,5353656.1994-10-11. 被引量:1
  • 7Torti R,Gondhalekar V,Tran H,et al.Electrostatically suspended and sensed micromechanical rate gyroscope[A].Proceeding of SPIE on Sensing,Processing,and Understanding for Control and Guidance for Aerospace Vehicles[C].Orlando,April 1994,SPIE,2220:27-38. 被引量:1
  • 8Esashi M.Saving energy and natural resource by micro-nanomachining[C].15th IEEE int conf on MEMS,2002:220-227. 被引量:1
  • 9Murakoshi T,Fukatsu K,Nakamura S,et al.Electrostatically levitated ring-shaped rotational gyro/accelerometer[J].Jpn J Appl Phys,2003,42,Pt.1 (4B):2468-2472. 被引量:1
  • 10Cui F,Chen W Y,et al.Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology[A].Proceeding of SPIE on MEMS/MOEMS Technologies and Applications Ⅱ[C].Nov.2004,Beijing,SPIE,5641:264-275. 被引量:1

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