摘要
一种高介电常数(K=7.6～11.6)的有机铁电聚合物材料——偏氟乙烯与三氟乙烯共聚物首次作为介质层用于介质上电润湿效应的数字微流控器件.在30 V的外加电压下,液滴与器件间的固-液接触角可以从118°下降到75°,并且呈现明显的电压极性相关性.基于此现象,设计并制作了新型的单平面电极阵列结构的数字微流控器件,简化了器件结构和工艺流程,整个工艺步骤可以与集成电路工艺兼容.新型器件成功实现了3μL的液滴的往返运输,工作电压只需20 V.
An organic ferroelectric material P （VDF-TrFE） （Poly（vinylidene fluoride-trifluoroethylene） with high dielectric constant （K= 7.6-11.6） is firstly used as the dielectric layer of EWOD mierofluidies. As a result, the contact angle between the liquid droplet and the surface of the device changes from 118~ to 75~ under applied voltage of 30 V. Based on the observed voltage-polarity-related electrowetting phenomenon, a novel single-side coplanar electrode array EWOD device is developed. The device is featured with the advantages of simple device structure and IC compatible manufacture processes. A 3μL droplet is successfully driven back and forth under the operating voltage of 20 V.
出处
《复旦学报（自然科学版）》
CAS
CSCD
北大核心
2010年第2期185-189,共5页
Journal of Fudan University：Natural Science
基金
国家自然科学基金(60876085)
国家科技重大专项基金(2008ZX100 03 003)资助项目
