摘要
为了实现对闭合干涉条纹的处理,采用线性插值的原理,将笛卡尔直角坐标系下的闭合条纹转换到极坐标系下,利用二值化、细化算法提取条纹几何中心点的位置,经逆变换映射回原直角坐标系,分析得到与之对应的相位值.对实际采集的干涉条纹进行处理,得到PV值为0.403 6λ,RMS值为0.062 43λ.与Taylor Hobson轮廓仪对同一被测面的检测结果比较,PV和RMS值的偏差分别为3.7%和1.4%.
The algorithms to process interferogram with closed fringes are studied based on fringe coordinate transform method. Closed fringe pattern is converted to open fringe patterns by transforming the interferogram from the Cartesian coordinate system to a polar coordinate system. Then the fringe center is located by means of fringe thinning. The phase distribution for the original closed fringe pattern is obtained by inverse coordinate transformation from the potar coordinate system back to the Cartesian coordinate system. The actual interferogram is measured to show that the value of PV is 0. 403 6 λ and RMS is 0. 062 43λ. Compared with results of identical hyperboloid tested by Taylor-Hohson,the inaccuracy of PV is 3. 7% and RMS is 1.4%.
出处
《西安工业大学学报》
CAS
2010年第2期103-107,共5页
Journal of Xi’an Technological University
基金
陕西省教育厅专项科研计划项目(08JK314)
西安工业大学校长科研基金项目(XAGDXJJ0991)
关键词
干涉图处理
闭合条纹
坐标变换
条纹中心
interferogram processing
closed fringe
coordinate transform
fringe centre
