摘要
本文主要简述光栅尺的最新发展历程。介绍了光栅尺的结构和测量原理以及光栅尺的分类和应用,讨论了光栅尺发展所面临的测量精度、信号处理及栅距细分、光栅的参考标记和绝对坐标以及光栅的载体和热性能等关键问题,并指出了光栅尺未来良好的发展趋势。
The latest development of grating scale is reviewed.First,the structure and measuring principle of grating scale are introduced.Then the classification and application of grating scale are illustrated.Furthermore,several key factors of measurement accuracy,signal processing,the subdivision of grating pitch,the reference markup and absolute coordinates of grating and grating carrier and thermal properties which presented in the development of grating are described in detail.The paper also describes the trend of future development of grating scale.
出处
《激光杂志》
CAS
CSCD
北大核心
2010年第1期1-3,共3页
Laser Journal
基金
国家科技部支撑计划（2006BAK03A03）资助
上海市科委课题（07DZ22026 08DZ2272800 08ZR1415400）资助
关键词
精密定位
莫尔光栅
光栅尺
位移检测
precision positioning
Moiré grating
grating scale
displacement detection
