摘要
随着微机电系统(MEMS)技术的发展,近年来钛及钛合金的微细群孔加工成为国内外研究的热点。虽然光刻电解加工结合了光刻技术和电解加工两者的优点,可实现高效、高精度金属微细群孔加工。但由于钛及钛合金表面极易钝化,常规电解加工难度很大。采用有机电解液有效地解决了加工过程中的表面钝化问题。此外,为克服电解加工过程中产物难以排出造成的腐蚀不均匀等难题,进行了激波辅助纯钛微细群孔光刻电解试验研究,在厚100μm纯钛薄板上进行了群孔加工,平均孔径为371μm,材料蚀除速率达到35μm/min。实验结果表明,通过激波产生的瞬时压力扰动,能显著改善极间状态,有效提高加工稳定性和表面质量,尺寸一致性好。
Multiple micro-hole machining of titanium is becoming very important in recent years as MEMS develops. Through-mask electrochemical micromachining is very effective on multiple microhole machining. However, it＇s not suitable for titanium, because titanium is apt to passivate. The paper introduces an organic electrolyte which can solve the problem. Furthermore, shock wave can disturbance the electrolyte effectively, so it is introduced in the study. Experiments show shock wave can increase uniformity, surface quality and the etch rate （35μm/min） by discharging electrolysis product and gas. The average bore is 371 μm.
出处
《电加工与模具》
2010年第1期13-16,共4页
Electromachining & Mould
关键词
激波
光刻电解
钛
微细群孔
shock wave
electrolytic photo etching
titanium
micro-hole array
