摘要
采用热蒸发法制备氧化锡薄膜,结合相关理论制定了一系列实验。在不同的工艺条件下制备了氧化锡薄膜,研究了温度、基片距离和环境压力对薄膜的影响,并利用X射线衍射仪、拉曼谱仪对薄膜进行了成分及结构测试,用阴极发光方法测定了薄膜的发光性质。
Tin oxide films have been synthesized by thermal evaporation on the basis of related theories. Tin oxide films were prepared under different deposition conditions. The effect of temperature, substrate distance and ambient atmosphere on the film were investigated. The obtained films were characterized by XRD,Raman and spectroscopy. The luminescence properties were also measured by cathodeluminescence.
出处
《湖北汽车工业学院学报》
2009年第4期56-59,共4页
Journal of Hubei University Of Automotive Technology
关键词
氧化锡
薄膜
热蒸发法
阴极发光
tin oxide
thin fihn
thermal evaporation
cathodeluminescence
