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SnO_2纳米薄膜的溶胶-凝胶法制备及气敏性能 被引量:7

The sol-gel synthesis and gas sensitivity of SnO_2 thin film
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摘要 以SnCl2.2H2O和无水乙醇为原料制备SnO2透明溶胶,通过浸渍法在云母基片上制备了SnO2纳米薄膜。利用XRD和AFM手段研究了薄膜的结构和形貌,结果表明,SnO2纳米薄膜的球形粒径约为15nm;随着薄膜沉积层数的增加或工作温度的升高,薄膜电阻逐渐减小。气敏特性研究表明,薄膜对H2有较好的敏感性。 Transparent SnO2 sols were obtained by a sol-gel method from SnCl2· 2H2O in absolute ethanol, and SnO2 thin film were prepared by dip-coating technique. The microstructure of thin films was studied by XRD, AFM. The average size of the spherical SnO2 particles obtained is 15nm. The sheet resistance of the multi-ply SnO2 decreased with the increased of the film thickness and the operating temperature. The further study on its gas sensitivity demonstrated that it had a good sensitivity to H2.
出处 《化工新型材料》 CAS CSCD 北大核心 2008年第1期15-16,30,共3页 New Chemical Materials
基金 国家"863"计划项目(2004AA302032)
关键词 SNO2薄膜 溶胶-凝胶 气敏性 SnO2 thin film, sol-gel, gas sensitivity
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参考文献5

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