摘要
介绍了一种压力、温度复合传感器的主要研制加工技术。通过采用灵敏度温度自补偿技术、激光调阻技术、以及薄膜微电路加工工艺等关键技术和手段,在弹性体上制作薄膜应变电阻和薄膜温敏电阻,实现压力、温度双参数测量的功能。同时通过监测温度,可以进一步精确修正压力参数测量的特性方程。
In the paper, a main technology of developing and processing compound transducer of pressure and temperature is introduced. In the technology, with thin film strain resistor and temperature sensitive resistor deposited on elastomer, the function of pressure-temperature-two-parameter measurement is achieved, using the technique of sensitivity temperature self-compensating, laser resistor trimming and thin film micro-circuit processing. Meanwhile, by monitoring the temperature, the characteristic equa- tion of measured pressure parameter can be further accurately corrected.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期175-177,共3页
Instrument Technique and Sensor
关键词
压力
温度
薄膜沉积
薄膜微电路
pressure
temperature
deposition of thin films
microcircuit of thin film