摘要
为确定卷积效应以及深度制作误差对小F数连续浮雕衍射透镜(DOE)轴向聚焦特性影响,基于瑞利-索末菲衍射理论建立了激光直写制作的连续浮雕衍射透镜非旁轴近似轴向光强分布模型。该模型考虑了连续浮雕衍射透镜的轴向衍射聚焦特性与透镜结构参数、写入光斑尺寸和扫描间距以及深度制作误差的关系,克服了傍轴近似条件下传统模型的不精确性。为验证模型的正确性,用激光直写制作了设计波长为441.6 nm,F数为4以及相位匹配因子为3的连续浮雕衍射透镜,并测试了波长441.6 nm激光入射时透镜的轴向聚焦特性。实验与分析表明,该模型分析结果与实验测试结果符合,从而证实模型的有效性,为激光直写制作的小F数连续浮雕衍射透镜的应用提供了理论依据。
In order to study the effect of convolution effect and fabrication errors on the axial focusing characteristics of low F-number diffractive optical elements （DOE） with continuous relief fabricated by laser direct writing, a theoretical model is established using Rayleigh-Sommerfeld diffraction theory to describe the influence of the structure parameters, the diameter of the writing spot, the interscan distance and the fabrication errors on the diffraction focusing characteristics of low F-number DOE with continuous relief, and continuous-relief DOE with a design wavelength of 441.6 nm, a F-number of 4 and a phase depth factor of 3 are fabricated and measured. The good agreement between theoretical and experimental results verifies the validity of the diffraction model established.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2009年第11期3192-3196,共5页
Acta Optica Sinica
基金
国家自然科学基金(60878028
60908026)
黑龙江省博士后资助经费(LBH-Z08214)
哈尔滨市科技创新人才研究专项资金(2008RFQXG024)
哈尔滨工程大学基础研究基金(HEUFT07079)资助课题
关键词
小F数连续浮雕衍射透镜
轴向聚焦
瑞利-索末菲衍射理论
激光直写
low F-number diffractive optical elements with continuous relief
axial focusing, Rayleigh
Sommerfeld diffraction theory
laser direct writing
