摘要
提出了一种新型的Si基M Z干涉型微光电机械系统(MOEMS)加速度地震检波器。在Si基上集成了Si十字梁、质量块、偏振器、M Z波导干涉仪及声光调制器。给出了该加速度检波器工作原理,对结构进行了分析设计,并用有限元(FEM)分析软件进行了仿真计算。该检波器的主要设计参数为:固有频率1353Hz,相位检测灵敏度1.2×10-4rad/(m·s2)。
A novel Si-based micro-optical-electro-mechanical systems (MOEMS) acceleration seismic geo-phone was present based on M-Z interferometry. In one silicon chip, several elements including four silicon beams, seismic mass, a polarizer, M-Z waveguide interferometer and acousto-optic phase modulator are integrated. The working principle and the optimization structure design of the acceleration seismic geophone are given. The simulation result performed in FEM software ANSYS agrees with the theoretical analysis well. The main design parameters of the geophone system are: resonance frequency 1353 Hz, phase detection sensitivity φ/a:l.2 × 10-4 rad/(m·s2).
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2004年第11期1263-1266,共4页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(40274047)
关键词
集成光学
波导
偏振器
MOEMS
声光调制器
微光电机械系统
干涉仪
量块
分析设计
相位检测
Acceleration measurement
Accelerometers
Computer simulation
Earthquakes
Finite element method
Light interference
Microelectromechanical devices
Sensitivity analysis
Structural design
