摘要
文中介绍了电子束曝光机束斑直径和束流大小的测量方法,提出调整束斑直径的基本原理,设计了一种实现束径和束流最佳配合的自动测量和调整系统。
In this paper,a measurement meant of the beam spot and the beam current of the electron-beam exposure machine are presented,a theory of the beam spot modification is presented,Designed a system for the automatic measurement .modification of the beam spot and the beam current.
出处
《电子测量技术》
1998年第4期40-43,共4页
Electronic Measurement Technology
关键词
电子束曝光机
束斑直径
束流大小
自动测量
Electron-beam exposure machine Beam spot Beam current Automatic measurement and modificatin
