摘要
利用电弧离子镀设备,在45#钢基体上制备了两种调制比的Cr/CrN多层膜。采用X射线衍射技术(XRD)、扫描电子显微镜(SEM)、电子探针(EPMA)、M273A电化学系统等技术分析了薄膜的相结构、表面形貌、横截面元素分布、模拟海水中的抗腐蚀性能。结果表明:膜层主要由CrN、Cr2N和Cr组成,以Cr2N(111)为择优取向;膜层为Cr层-过渡层-CrN层的"三明治"调制结构;Cr/CrN多层膜结构与中间Cr层的存在可以显著提高基体和单层CrN抗腐蚀性能,45#钢+Cr/CrN(5/10)的防护体系抗腐蚀性能最佳。
The Cr/CrN muhilayer thin films with two different percentage modulations were prepared on #45 steel substrates by arc discharge deposition, of which the phase composition, surface morphology, cross-section element distribution and anticorrosion behavior in artificial seawater were analyzed by XRD, SEM, EPMA （electroprobe microanalysis） and M273A electrochemistry system. The results indicated that the film is mainly composed of CrN, Cr2N and Cr layers with Cr2N （111） as preferred orientation. The film presents a modulated sandwich mirostructure in muhilayer form of Cr-transition-CrN. The existence of Cr/CrN mulilayer structure and intermediate Cr layer can remarkably improve the anti-corrosion behavior of substrate and CrN monolayer, and the #45 steel in combination with Cr/CrN（5/10） provides best protection system from corrosion.
出处
《真空》
CAS
北大核心
2009年第5期22-25,共4页
Vacuum
关键词
CrlCrN
多层膜
电弧离子镀
腐蚀
Cr/CrN
multilayer film
arc discharge deposition
corrosion
