摘要
针对多晶硅铸锭炉的温度控制,提出了一种基于微分先行算法的PID控制方法。应用结果说明,该PID控制方法能对多晶铸锭炉的温度进行有效控制。
This paper put forward a Differential ahead PID control for temperature control of Ploysili con Ingot Furnace. Our results indicate that the PID control is effective for temperature of Ploysilicon Ingot Furnace.
出处
《电子工业专用设备》
2009年第7期42-45,共4页
Equipment for Electronic Products Manufacturing
关键词
多晶硅铸锭炉
PID
温度控制
Polysilicon Ingot Furnace
PID
temperature control
